The use of quartz tanks in semiconductor wet etching process is highly recommended by many experts in the industry. The tool is considered to be the most ideal for the processing the material mentioned. The reasons are pretty simple and practical. Aside from the fact that quartz are made from the second most abundant mineral on Earth's continental crust, other compelling reasons (on why you should use quartz tanks) are the following:
Durability -- quartz are harder that granite and other well-known metals; in fact, it ranks 7th on the Mohs scale of mineral hardness. So, no wonder why this material is durable, which has made it popular in the industry.
Non-reactivity to a variety of chemistries -- there is nothing to worry about contamination of the processed semiconductor as quartz tanks do not react with the chemistries/substances you use in the wet etching process. You still are going to have an output that is of high quality and purity.
High purity - quartz provides high purity standard so there is nothing to worry about this problem. This is very important most especially when processing semiconductors wherein high purity is absolutely necessary.
Aside from quartz tanks, there are other products as well that are made from quartz that are useful also in wet etch processing. Some of these products are the following:
Quartz boats - also popular as "substrate carriers," are made to accommodate substrates measuring 4", 6", 8", and 12" in diameter. However, manufacturers can also make quartz boats of any sizes and designs - according to your own specifications.
Quartz chambers -- are made to handle plasmas that of extreme temperatures but require high purity and visual verification; as quartz materials are high resistant to heat, quartz chambers are just ideal for this chemistry.
Quartz drains -- in general, these components are put on either the side or below the quartz tanks; these are used to recirculate chemistries or for chemical disposals.
Quartz aspirators - these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is utilized in high temperature applications.
Quartz boat adapters - can reduce cost in wafer processing; can also help for increased production throughput.
Durability -- quartz are harder that granite and other well-known metals; in fact, it ranks 7th on the Mohs scale of mineral hardness. So, no wonder why this material is durable, which has made it popular in the industry.
Non-reactivity to a variety of chemistries -- there is nothing to worry about contamination of the processed semiconductor as quartz tanks do not react with the chemistries/substances you use in the wet etching process. You still are going to have an output that is of high quality and purity.
High purity - quartz provides high purity standard so there is nothing to worry about this problem. This is very important most especially when processing semiconductors wherein high purity is absolutely necessary.
Aside from quartz tanks, there are other products as well that are made from quartz that are useful also in wet etch processing. Some of these products are the following:
Quartz boats - also popular as "substrate carriers," are made to accommodate substrates measuring 4", 6", 8", and 12" in diameter. However, manufacturers can also make quartz boats of any sizes and designs - according to your own specifications.
Quartz chambers -- are made to handle plasmas that of extreme temperatures but require high purity and visual verification; as quartz materials are high resistant to heat, quartz chambers are just ideal for this chemistry.
Quartz drains -- in general, these components are put on either the side or below the quartz tanks; these are used to recirculate chemistries or for chemical disposals.
Quartz aspirators - these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is utilized in high temperature applications.
Quartz boat adapters - can reduce cost in wafer processing; can also help for increased production throughput.
About the Author:
Roy Van Rivero writes an array of technology-related subjects. He uses his years of work experience in the industry in writing these topics, including quartz tanks and inline heater for semiconductor. To learn more, visit Imtec Acculine, manufacturer of wet process module and system.
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